Wafer Level Reliability
WLR0100
Wafer Level Reliability Test System
WLR0100 is a standard high-temperature reliability test system for semiconductor wafer level devices provided by Semight. It provides high-precision, high-voltage output which can store and record high-precision current for a long time, and tests related functions of devices.
Feature
Voltage range
0-200V software settableChannel hardware independent current limiting
0-10mA software settableMonitoring current sampling rate
Minimum 10nA accuracyIndependent double temperature zone
Up to 200 ℃Single board support channel
32 channelsChannel independent gear
It can meet the accuracy and range requirements, and the channel is independentProduct abnormal protection function
The equipment has overvoltage and overcurrent protection functionsSupport nitrogen access protection
Functions and advantages
Burn-in Board for DIP Package
The supporting burn-in board adopts a gold finger structure. The following figure shows a typical DIP packaged of burn-in Board.The WLR0100 test software platform is a configurable platform, including the following functions:
Support the in place pre inspection function of online products, which can detect whether the user has good plug and pull contact;Technical Parameter |
DUT | DIP or TO247 Burn-in Board |
Test temperature range | (RT+20)℃~+200℃ | |
Electrical parameters |
Test parameters |
Storage of original test data, calculation results and detailed system operation logs |
Channel | Up to 384 ch | |
Drive board | Independent 32 ch current and voltage monitoring | |
System driver board | 12 driving boards independently adjust voltage and current limiting | |
Vth scanning test | Range:0V~200V ,Accuracy:0.5%RD±500mV; | |
Saturation current test | ≤10mA | |
Leakage current range and accuracy |
Range:1mA~10mA ,Accuracy:0.5%RD±50uA; Range:100uA-1mA ,Accuracy:0.5%RD±500nA; Range:10uA-100uA ,Accuracy:0.5%RD±50nA; Range:1uA-10uA ,Accuracy:0.5%RD±5nA; Range:0nA-1uA ,Accuracy:0.5%RD±500pA; |
|
Voltage range and accuracy |
Range:0V~20V ,Accuracy:0.5%RD±50mV; Range:20V~200V ,Accuracy:0.5%RD±500mV; |
|
Data monitoring |
Support the monitoring of voltage and current and upload them to PC client, detect and record the parameters of each test station during the whole test process, and draw the output curve and Excel data report |
|
Temperature parameters |
Test environmental conditions |
When the ambient temperature is+25 ℃ and there is no sample in the test chamber and no air exchange |
Test method | GB/T 5170.2-2017 Temperature test equipment | |
Temperature range | (ambient temperature+20)℃~+200℃ | |
Temperature fluctuation | ≤100℃:0.4℃; ≤200℃:0.4℃ | |
Temperature deviation (no-load) | ≤100℃:±1.5℃; ≤200℃:±2.0℃ | |
Temperature deviation (full load) | ≤100℃:±2.0℃; ≤200℃:±3.0℃ | |
Gas parameters |
Fluid | N2、CO2 (Normal temperature, dry gas) |
Fluid pressure |
Air source pressure requirements: ≥1MPa (10kg/cm²)(101、201、301 model); ≥1.5MPa (15kg/cm²)(401 model) Maximum allowable pressure at valve inlet: 2.0kg/cm²( 101、201、301 model); 5.0kg/cm²( 401 model) |
|
Flow | Maximum flow:30L/min(101、201、301 model); 250 L /min(401 model) | |
Air connection |
10mmAir source interface requirements: quick plug pneumatic pipe straight, specification φ 10mm |
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