Wafer Level Reliability
WLR0100
Wafer Level Reliability Test System
The Semight WLR0100 is a standard High-Temperature Reliability Test System for semiconductor wafer level devices. It provides high-precision, high-voltage output which can store and record high-precision current for a long time, and tests related functions of devices.
Features
Voltage Range
0-200V software configurableIndependent Channel Current Limiting
0-10mA software configurableCurrent Sampling Rate Monitoring
Minimum 10nA precision; 32 products on a single board scanned within 1 secondIndependent Dual Temperature Zones
Supports up to 200°CSingle Board Channel Support
32 channelsIndependent Channel Configuration
Meets precision and capacity requirements with independent channel settingsProduct Abnormal Protection
Overcurrent/overvoltage protection with configurable thresholds.Burn-in Chamber Nitrogen Protection
Supports nitrogen injection for enhanced safety and oxidation preventionFunctions and Advantages
Burn-in Board for DIP Package
The supporting burn-in board adopts a gold finger structure. The following figure shows a typical DIP packaged of burn-in board.The WLR0100 Test Software Platform is a Configurable Platform, Including the Following Functions:
It supports the in place pre inspection function of online products, which can detect whether the user has good plug and pull contact.Technical Parameters |
DUT | DIP or TO247 burn-in board |
Test Temperature Range | (RT+20)℃~+200℃ | |
Electrical Parameters |
Test Parameters |
Storage of original test data, calculation results and detailed system operation logs |
Channel | Up to 384 ch | |
Drive Board | Independent 32 ch current and voltage monitoring | |
System Driver Board | 12 driving boards independently adjust voltage and current limiting | |
Vth Scanning Test | Range:0V~200V, Accuracy:0.5%RD±500mV | |
Saturation Current Test | ≤10mA | |
Leakage Current Range and Accuracy |
Range:1mA~10mA, Accuracy:0.5%RD±50uA Range:100uA-1mA, Accuracy:0.5%RD±500nA Range:10uA-100uA, Accuracy:0.5%RD±50nA Range:1uA-10uA, Accuracy:0.5%RD±5nA Range:0nA-1uA, Accuracy:0.5%RD±500pA |
|
Voltage Range and Accuracy |
Range:0V~20V, Accuracy:0.5%RD±50mV Range:20V~200V, Accuracy:0.5%RD±500mV |
|
Data Monitoring |
Supports the monitoring of voltage and current and upload them to PC client, detect and record the parameters of each test station during the whole test process, and draw the output curve and Excel data report |
|
Temperature Parameters |
Test Environmental Conditions |
When the ambient temperature is+25 ℃ and there is no sample in the test chamber and no air exchange |
Test Method | GB/T 5170.2-2017 Temperature test equipment | |
Temperature Range | (ambient temperature+20)℃~+200℃ | |
Temperature Fluctuation | ≤100℃:0.4℃; ≤200℃:0.4℃ | |
Temperature Deviation (no-load) | ≤100℃:±1.5℃; ≤200℃:±2.0℃ | |
Temperature Deviation (full load) | ≤100℃:±2.0℃; ≤200℃:±3.0℃ | |
Gas Parameters |
Fluid | N2、CO2 (Normal temperature, dry gas) |
Fluid Pressure |
Air source pressure requirements: ≥1MPa (10kg/cm²)(101、201、301 model) ≥1.5MPa (15kg/cm²)(401 model) Maximum allowable pressure at valve inlet: 2.0kg/cm²(101、201、301 model) 5.0kg/cm²(401 model) |
|
Flow | Maximum flow:30L/min(101、201、301 model); 250 L /min(401 model) | |
Air Connection |
10mm air source interface requirements: quick plug pneumatic pipe straight, specification φ 10mm |
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