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Wafer Level Reliability

WLR0100

Wafer Level Reliability Test System


The Semight WLR0100 is a standard High-Temperature Reliability Test System for semiconductor wafer level devices. It provides high-precision, high-voltage output which can store and record high-precision current for a long time, and tests related functions of devices.


Features

  • Voltage Range

    0-200V software configurable
  • Independent Channel Current Limiting

    0-10mA software configurable
  • Current Sampling Rate Monitoring

    Minimum 10nA precision; 32 products on a single board scanned within 1 second
  • Independent Dual Temperature Zones

    Supports up to 200°C
  • Single Board Channel Support

    32 channels
  • Independent Channel Configuration

    Meets precision and capacity requirements with independent channel settings
  • Product Abnormal Protection

    Overcurrent/overvoltage protection with configurable thresholds.
    Response time < 100ns, overshoot < 5%
  • Burn-in Chamber Nitrogen Protection

    Supports nitrogen injection for enhanced safety and oxidation prevention

Functions and Advantages

  • Burn-in Board for DIP Package

    The supporting burn-in board adopts a gold finger structure. The following figure shows a typical DIP packaged of burn-in board.
  • The WLR0100 Test Software Platform is a Configurable Platform, Including the Following Functions:

    It supports the in place pre inspection function of online products, which can detect whether the user has good plug and pull contact.
    Supports flexible editing and configuration of burn-in reliability tasks, and conduct reliability testing.
    Provides intuitive data display and data analysis functions.
    Supports user authority control, including engineer, technician and operator.


Technical Parameters

DUT DIP or TO247 burn-in board
Test Temperature Range (RT+20)℃~+200℃










Electrical Parameters

Test Parameters Storage of original test data, calculation results and detailed
system operation logs
Channel Up to 384 ch
Drive Board Independent 32 ch current and voltage monitoring
System Driver Board 12 driving boards independently adjust voltage and current limiting
Vth Scanning Test Range:0V~200V, Accuracy:0.5%RD±500mV
Saturation Current Test ≤10mA



Leakage Current Range and Accuracy

Range:1mA~10mA, Accuracy:0.5%RD±50uA
Range:100uA-1mA, Accuracy:0.5%RD±500nA
Range:10uA-100uA, Accuracy:0.5%RD±50nA
Range:1uA-10uA, Accuracy:0.5%RD±5nA
Range:0nA-1uA, Accuracy:0.5%RD±500pA
Voltage Range and Accuracy Range:0V~20V, Accuracy:0.5%RD±50mV
Range:20V~200V, Accuracy:0.5%RD±500mV
Data Monitoring Supports the monitoring of voltage and current and upload
them to PC client, detect and record the parameters of each
test station during the whole test process, and draw the output
curve and Excel data report







Temperature Parameters

Test Environmental Conditions When the ambient temperature is+25 ℃ and there is no
sample in the test chamber and no air exchange
Test Method GB/T 5170.2-2017 Temperature test equipment
Temperature Range (ambient temperature+20)℃~+200℃
Temperature Fluctuation ≤100℃:0.4℃; ≤200℃:0.4℃
Temperature Deviation (no-load) ≤100℃:±1.5℃; ≤200℃:±2.0℃
Temperature Deviation (full load) ≤100℃:±2.0℃; ≤200℃:±3.0℃






Gas Parameters

Fluid N2、CO2 (Normal temperature, dry gas)



Fluid Pressure

Air source pressure requirements:
≥1MPa (10kg/cm²)(101、201、301 model)
≥1.5MPa (15kg/cm²)(401 model)
Maximum allowable pressure at valve inlet:
2.0kg/cm²(101、201、301 model)
5.0kg/cm²(401 model)
Flow Maximum flow:30L/min(101、201、301 model); 250 L /min(401 model)
Air Connection 10mm air source interface requirements: quick plug pneumatic pipe straight,
specification φ 10mm

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