Wafer Acceptance Test
WAT6300
High Voltage Parametric Test System
WAT6300 is a serial high-voltage semiconductor parametric test system. The system is configurable to realize vertical and universal high-voltage tests, and it can quickly perform accurate high and low voltage DC measurements, capacitance measurements, etc.
Features
Self-developed hardware resources
Self-developed SMU & HV-SMU, PGU, Low-leakage Switch Matrix,
3500V high voltage
Meet very high voltage test for SiC, GaN
Flexible configuration of Pin number
Support 48 pin full kelvin pins
High precision
System leakage current ＜ 1pA
SECS/GEM compliance
Easy integration to customer EAP or factory automation
Built-in Maintenance software
CAL/DIAG/PV
48pin 230mm-diamter probe card
Protect customer investment on probe card, low migration cost to new tester
Compatible with mainstream probers
TEL P8XL/P12/P12XL/Precio XL, TSK UF200/UF3000/UF3000EX, etc.
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# |
Category |
Sub-Category |
Description |
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1 |
System Cabinet |
Cabinet |
Rack, EMO, Power Supply and Distribution Unit |
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Controller |
Win10 Workstation, ptSEMIGHT software suites |
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LCR |
Optional 1fF~100nF range Frequency:1KHz~1MHz |
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DMM |
Optional 7 ½ display resolution |
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Signal Analyzer |
Optional 9K~10M frequency range |
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Vertical High Voltage Switch Matrix |
RM1012-HV (Optional): 2 low voltage channels(200V), 1 high voltage channel(3500V), 1 input port for CMU with 3000V HV-bias, 1 output port to prober chuck |
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High Voltage SMU |
Optional: 3500V, 120mA, 100uV/10fA (Semight S3030F) 1100V, 1A, 100nV/10fA (Commercial SMU) |
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2 |
Test Head |
Test Head Mainframe |
Mainframe, PXIe chassis for SMU & PGU |
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Low-leakage Switch Matrix |
RM1010-LLC1: Switch Matrix with 14 input channels, maximum 4 daughter cards (R1010G-LLC) each supporting 12 output channel (totally 48 outputs)
R1010G-LLC: Daughter card for Switch Matrix, 200V, 1A, <100fA @10V(low leakage channel) |
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Universal High Voltage Switch Matrix |
RM1013-HV (Optional): Universal HV Switch Matrix mainframe, 10 input ports (2 for 3500V), 3x R1013G-HV daughter cards for maximum 24 output ports
R1013G-HV (Optional): Universal HV Switch Matrix daughter card, 8 output ports, each port supports 3500V, 1A and <1pA@10V leakage |
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Source Measure Unit (SMU) |
S2012C (optional): 1x PXIe slot, 200V, 1A, 100nV/10fA
S2016C (optional): 1x PXIe slot, 200V, 1A, 100nV/1fA |
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Semiconductor Pulse Generator (SPGU) |
S3023P (optional): 2x PCIe slots, ±40V(Open), ±20V(50Ω) |
1. 600V for 48 output channels; 3500V for 24 output channels
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Application |
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High voltage WAT test for Si/GaN/SiC, WLR |
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Test Items (typical) |
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IV/CV |
Id-Vd，Id-Vg，Vth，BV，Ig，Ioff，Gm |
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MIM_CAP，C & G |
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Ic-Vc，BETA，BV |
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Ron，R_tlm，Rsh_van |
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Spot，Sweep，Search |
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Kelvin & Non-Kelvin |
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Differential Voltage |
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Frequency |
Frequency |
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Reliability |
HCI，BTI/NBTI，TDDB |
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DC |
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Resource |
Semight S2012C，S2016C, S3030F, Commercial SMU |
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Function |
Spot, Sweep |
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Range |
S2012C：10fA to 1A 100nV to 200V |
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S2016C: 1fA to 1A 100nV to 200V |
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S3030F: 10fA to 120mA 100uV to 3500V |
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Commercial SMU: 10fA to 1A 100nV to 1000V |
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Capacitance |
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Resource |
External LCR |
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Function |
C/G |
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Frequency |
1kHz, 10kHz, 100kHz, 1MHz |
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Range |
1fF to 100nF |
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DC Bias |
±40 V |
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HV DC Bias |
±3000 V |
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Differential Voltage |
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Resource |
External DMM |
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Range |
1µV to 100V |
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Pulse Generation |
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Resource |
Semight S3023P |
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Amplitude |
±40V (Open), ±20V(50Ω) |
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Frequency |
0.1Hz to 10MHz |
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Pulse Width |
60 ns to (Period - 60 ns) |
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Tr/Tf |
20 ns (Vamp < 5V, Open） |
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Frequency Measurement |
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Resource |
External Signal Analyzer |
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Frequency Range |
9K to 10M Hz |
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Low-leakage Switch Matrix |
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Switch Matrix |
Semight RM1010-LLC |
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Output Channels |
x12, x24, x36, x48 |
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Interface |
Maximum 8 input SMUs (2 for low leakage) |
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Maximum 14 input ports, include 2x 4-1 MUX ports for external instruments (SMU/LCR/DMM/PGU) |
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|
Vertical High Voltage Switch Matrix |
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Switch Matrix |
Semight RM1012-HV |
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Output |
1 output port |
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Input |
4 input ports: 2 for LV (200V), 1 for HV (3500V), 1 for CMU with 3000V HV-bias |
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Universal High Voltage Switch Matrix |
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Switch Matrix |
Semight RM1013-HV |
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Output |
x8, x16, x24, CHUCK |
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Input |
Maximum 10 input ports: 6x for SMUs, 2x for 3-1 MUX ports used by external instruments, 2x HV ports (3500V) |
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