Wafer Acceptance Test
WAT6200S
Serial Parametric Test System
WAT6200S is a serial parametric test system that can quickly perform accurate DC measurements, capacitance measurements, and other high-frequency applications (such as ring oscillator measurements), flash memory tests and so on.WAT6200S built-in a low-leakage switch matrix with 14 input ports and configurable, maximum 48 output ports (x12, x24, x36, x48). It supports a special pin connecting to prober chuck. WAT6200S supports up to 8 source measurement unit (SMU) inputs, each can source and measure individual current or voltage. The system supports up to 4 channels of high-voltage semiconductor pulse generation unit (HV-SPGU), providing fast pulse generation capabilities for modern advanced flash memory testing. The system also supports access to external instruments such as DVM, LCR, Signal Analyzer, etc. via 6 auxiliary input ports and is able to achieve high-precision serial measurements of voltage, capacitance, frequency, etc.
Features
Self-developed hardware resources
Self-developed SMU, PGU, Low-leakage Swith Matrix, stable supply chain，short lead time
Flexible configuration of Pin number
Support 14 input ports, 48 output ports, independent port to chuck
High precision
The accuracy down to 1pA,
SECS/GEM compliance
Easy integration to customer EAP or factory automation
Built-in Maintenance software
Fast troubleshooting and diagnostic of hardware problem, timely guarantee of tester performance
Compatible with 48pin 230mm-diamter probe card
Protect customer investment on probe card, low migration cost to new tester
High adaptability and full compatibility
Familiar environment and easy to use, Python language for algo
Compatible with mainstream probers
TEL P8XL/P12/P12XL/Precio XL, TSK UF200/UF3000/UF3000EX, etc.
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# |
Category |
Sub-Category |
Description |
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1 |
System Cabinet |
Cabinet |
Rack, EMO, Power Supply and Distribution Unit |
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Controller |
Win10 Workstation, ptSEMIGHT software suites |
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LCR |
Optional 1fF~100nF range Frequency:1KHz~1MHz |
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DMM |
Optional 7 ½ display resolution |
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Signal Analyzer |
Optional 9K~10M frequency range |
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2 |
Test Head |
Test Head Mainframe |
Mainframe, PXIe chassis for SMU & PGU |
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Low-leakage Switch Matrix |
RM1010-LLC: Switch Matrix with 14 input channels, maximum 4 daughter cards (R1010G-LLC) each supporting 12 output channel (totally 48 outputs), Output to Prober Chuck
R1010G-LLC: Daughter card for Switch Matrix, 200V, 1A, <100fA @10V(low leakage channel) |
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|
Source Measure Unit (SMU) |
S2012C (optional): 1x PXIe slot, 200V, 1A, 100nV/10fA
S2016C (optional): 1x PXIe slot, 200V, 1A, 100nV/1fA |
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Semiconductor Pulse Generator (SPGU) |
S3023P (optional): 2x PCIe slots, ±40V(Open), ±20V(50Ω) |
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Application |
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|
Inline E-test, BEOL WAT, WLR for Si/GaN/SiC wafer |
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Test Items (typical) |
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IV/CV |
Id-Vd，Id-Vg，Vth，BV，Ig，Ioff，Gm |
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MIM_CAP，C & G |
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Ic-Vc，BETA，BV |
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Ron，R_tlm，Rsh_van |
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Spot，Sweep，Search |
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Kelvin & Non-Kelvin |
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Differential Voltage |
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Frequency |
Ring Oscillator Frequency |
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Reliability |
HCI，NBTI/PBTI，TDDB, etc. |
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DC |
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Resource |
Semight S2012C，S2016C |
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Function |
Spot, Sweep |
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Range |
S2012C：10fA to 1A, 100nV to 200V |
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S2016C: 1fA to 1A, 100nV to 200V |
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Capacitance |
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Resource |
External LCR |
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Function |
C/G |
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Frequency |
1kHz, 10kHz, 100kHz, 1MHz |
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Range |
1fF to 100nF |
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DC Bias |
±40 V |
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Differential Voltage |
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Resource |
External DMM |
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Range |
1µV to 100V |
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Pulse Generation |
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Resource |
Semight S3023P |
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Amplitude |
±40V (Open), ±20V(50Ω) |
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Frequency |
0.1Hz to 10MHz |
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Pulse Width |
60 ns to (Period - 60 ns) |
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Tr/Tf |
20 ns (Vamp < 5V, Open） |
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Frequency Measurement |
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Resource |
External Signal Analyzer |
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Frequency Range |
9K to 10M Hz |
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Low-leakage Switch Matrix |
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Switch Matrix |
Semight RM1010-LLC |
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Output Channels |
x12, x24, x36, x48 |
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Interface |
Maximum 8 input SMUs (2 for low leakage) |
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Maximum 14 input ports, include 2x 4-1 MUX ports for external instruments (SMU/LCR/DMM/PGU) |
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|
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Port to chuck |
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