Wafer Acceptance Test
WAT6200S
Serial Parametric Test System
The Semight WAT6200S series Serial Parametric Test System can quickly perform accurate DC measurements, capacitance measurements, as well as other high-frequency applications, flash memory testing, etc. The Semight WAT6200S series system is divided into two models: WAT6210S and WAT6215S. Both systems support up to 8-channel Source Measure Unit (SMU) inputs, which can be individually configured as current or voltage sources, or current or voltage meters. The system supports up to 4-channel high-voltage pulse generator units (HV-SPGU), providing fast pulse generator capabilities for modern advanced flash memory testing. The WAT6210S can be expanded to a maximum of 48-channel low-leakage current switch matrix output, with its switch matrix and SMU located within the test head. The WAT6215S uses two low-leakage current switch matrices and can be expanded to a maximum of 48-channel full Kelvin connection output, with all instruments housed in a cabinet for use with fully automatic or semi-automatic probe stations. The system also supports 6 or 12 auxiliary input ports for connecting external instruments, such as DVM, LCR, Signal Analyzer, etc., to achieve high-precision serial measurements of voltage, capacitance, and frequency.
Features
Self-developed Hardware Resources
Self-developed SMU, PGU, Low-leakage Switch Matrix, stable supply chain,short lead time
Flexible Configuration of Pin Number
Supports 14 input ports, 48 output ports, independent port to chuck
High Precision
The accuracy down to 1pA
SECS/GEM Compliance
Easy integration to customer EAP or factory automation
Integrated GAL/DIAG/PV Software
Supports for customizable user testing logs
48pin 230mm-diamter probe card
Protect customer investment on probe card, low migration cost to new tester
High Adaptability and Full Compatibility
Familiar environment and easy to use, python language for algo
Compatible with Mainstream Probers
TEL P8XL/P12/P12XL/Precio XL, TSK UF200/UF3000/UF3000EX, etc.
WAT6200S Series
|
NO. |
Model |
Product |
Description |
| 1 | WAT6210S | Serial Parametric Test System | 200V,1Adc,100nV/1fA,48Pin |
| 2 | WAT6215S | Serial Parametric Test System | 200V,1Adc,100nv/1fA,48Pin full kelvin,Cable Out |
|
Sub-Category |
Description |
|
Controller |
Win10 Workstation, ptSEMIGHT software suites |
|
LCR |
Optional 1fF~100nF range Frequency:1KHz~1MHz |
|
DMM |
Optional 7 ½ display resolution |
|
Signal Analyzer |
Optional 9K~10M frequency range |
|
Low-leakage Switch Matrix |
RM1010-LLC: Switch Matrix with 14 input channels, maximum 4 daughter cards (R1010G-LLC) each supporting 12 output channel (totally 48 outputs), Output to Prober Chuck
R1010G-LLC: Daughter card for Switch Matrix, 200V, 1A, <100fA @10V(low leakage channel) |
| PXIe Chassis | PXIe chassis compatible with SMU and SPGU quantities |
|
Source Measure Unit (SMU) |
S2012C (optional): 1x PXIe slot, 200V, 1A, 100nV/10fA
S2016C (optional): 1x PXIe slot, 200V, 1A, 100nV/1fA |
|
Semiconductor Pulse Generator (SPGU) |
S3023P (optional): 2x PCIe slots, ±40V(Open), ±20V(50Ω) |
|
Application |
|
|
Inline E-test, BEOL WAT, WLR for Si/GaN/SiC wafer |
|
|
Test Items (typical) |
|
|
IV/CV |
Id-Vd, Id-Vg, Vth, BV, Ig, Ioff, Gm |
|
MIM_CAP, C & G |
|
|
Ic-Vc, BETA, BV |
|
|
Ron, R_tlm, Rsh_van |
|
|
Spot, Sweep, Search |
|
|
Kelvin & Non-Kelvin |
|
|
Differential Voltage |
|
|
Frequency |
Ring Oscillator Frequency |
|
Reliability |
HCI, NBTI/PBTI, TDDB, etc. |
|
DC |
|
|
Resource |
Semight S2012C, S2016C |
|
Function |
Spot, Sweep |
|
Range |
S2012C: 10fA to 1A, 100nV to 200V |
|
S2016C: 1fA to 1A, 100nV to 200V |
|
|
Capacitance |
|
|
Resource |
External LCR |
|
Function |
C/G |
|
Frequency |
1kHz, 10kHz, 100kHz, 1MHz |
|
Range |
1fF to 100nF |
|
DC Bias |
±40 V |
|
Differential Voltage |
|
|
Resource |
External DMM |
|
Range |
1µV to 100V |
|
Pulse Generation |
|
|
Resource |
Semight S3023P |
|
Amplitude |
±40V (Open), ±20V(50Ω) |
|
Frequency |
0.1Hz to 10MHz |
|
Pulse Width |
60 ns to (Period - 60 ns) |
|
Tr/Tf |
20 ns (Vamp < 5V, Open） |
|
Frequency Measurement |
|
|
Resource |
External Signal Analyzer |
|
Frequency Range |
9K to 10M Hz |
|
Low-leakage Switch Matrix |
|
|
Switch Matrix |
Semight RM1010-LLC |
|
Output Channels |
x12, x24, x36, x48 |
|
Interface |
Maximum 8 input SMUs (2 for low leakage) |
|
Maximum 14 input ports, include 2x 4-1 MUX ports for external instruments (SMU/LCR/DMM/PGU) |
|
|
Port to chuck |
|
Similar recommendation
High speed communication test plays an important role in the rapid development of big data, cloud computing, 5G communication and other markets.
Semight offers various of instruments for optical Transceiver/Component testing, including wide bandwidth sampling oscilloscope, NRZ/PAM4 bit error ratio tester , burst error ratio tester, fast wavelength meter, optical spectrum analyzer, high precise source measure unit, 400G network analyzer ,optical power meter, optical attenuator, optical switch etc. We provide cost-effective, complete solutions for optical testing.
The high-precision source measure units integrates the functions of voltage source, current source, voltmeter, ampere meter, and electronic load in one, which is widely used in high-precision IV test and measurement for various discrete components, photovoltaic, green energy, battery and other industries. Semight provides high-precision benchtop SMU and plug-in PXIe SMU of standard PXIe chassis, fully meeting the application of various test scenarios.
Details
Burn-in testing of laser is an important method to ensure the reliability of laser. Through the test of CoC or bare die, the early failure of laser caused by the defects in the process of laser production can be screened out in advance. Semight provides a complete solution from bare die to CoC, from high temperature(150℃ or higher) to low temperature (-40℃), with CoC automatic loading and unloading system, forming a complete test solution, Semight's laser chip burn-in/load/unload test system has been widely recognized by the market.
Details
The semiconductor front-end test is mainly used in the wafer processing to check whether the processing parameters of the wafer products meet the design requirements or there are defects affecting the yield after each step of the manufacturing process. The semiconductor back-end test equipment is mainly used after wafer processing to check whether the performance of the chip meets the requirements, which belongs to the electrical performance test. Semight provides solutions such as Wafer Level Burn In system and Known Good Die handler for SiC testing, offering the value to customer in test efficiency improvement and test cost reduction.
DetailsFollow
Name
E-mail verfication code
Phone
Password
Confirm Password
E-mail address
E-mail verification code
New Password
Confirm Password
Ask for demo
