Wafer Acceptance Test
WAT6600
Parallel Parametric Test System
The WAT6600 is a high efficiency parallel parametric test system that can quickly perform accurate DC measurements, capacitance measurements, and other high-frequency applications (such as ring oscillator measurements), flash memory tests and so on.
Features
Self-developed
Self-developed hardware and measurement resources
High Output Capability
Per-pin resource providing
Configurable Pin Number
Maximum 48 Pin full kelvin
High Precision
The accuracy down to 1pA
SECS/GEM Compliance
Easy integration to customer EAP or factory automation
Built-in Maintenance Software
CAL/DIAG/PV
Compatible with 48pin
48pin 230mm-diamter probe card
Compatible with Mainstream Probers
TEL P8XL/P12/P12XL/Precio XL, TSK UF200/UF3000/UF3000EX, etc.
WAT6600 Series
|
NO. |
Model |
Product |
Description |
| 1 | WAT6610 | Parallel Parametric Test System | 200V,1Adc,100nV/1fA,48Pins,Perpin SMU&Perpin PGU |
|
# |
Category |
Sub-Category |
Description |
|
1 |
System Cabinet |
Cabinet |
Rack, EMO Power Supply and Distribution Unit |
|
Controller |
Win10 Workstation, ptSEMIGHT software suites |
||
|
LCR |
Optional 1fF~100nF range Frequency:1KHz~1MHz |
||
|
DMM |
Optional 7 ½ display resolution |
||
|
Signal Analyzer |
Optional 9K~10M frequency range |
||
|
PXIe Chassis |
Optional For external HV-SPGU |
||
|
Semiconductor Pulse Generator Unit |
Semight （Optional） ±40V(Open), ±20V(50Ω)
|
||
|
2 |
Test Head |
Mainframe |
Configurable pins |
|
Pin Board |
Semight S2018G: Per-pin SMU: ±200V, ±1A, 100nV/1fA Per-pin PGU: ±20V(Open), ±10V(50Ω) |
||
|
Aux port |
Default configuration: 8 BCN Port for external Instrument |
|
Application |
|
|
Inline E-test, BEOL WAT, WLR for advanced process |
|
|
Test Items (typical) |
|
|
IV/CV |
Id-Vd, Id-Vg, Vth, BV, Ig, Ioff, Gm |
|
MIM_CAP, C & G |
|
|
Ic-Vc, BETA, BV |
|
|
Ron, R_tlm, Rsh_van |
|
|
Spot, Sweep, Search |
|
|
Kelvin & Non-Kelvin |
|
|
Differential Voltage |
|
|
Frequency |
Ring Oscillator Frequency |
|
Reliability |
HCI, NBTI/PBTI, TDDB, etc. |
|
DC |
|
|
Resource |
Semight Per-pin SMU S2018G |
|
Function |
Spot, Sweep |
|
|
S2018G: 1fA to 1A, 100nV to 200V |
|
Capacitance |
|
|
Resource |
External LCR |
|
Function |
C/G |
|
Frequency |
1kHz, 10kHz, 100kHz, 1MHz |
|
Range |
1fF to 100nF |
|
DC Bias |
±40 V |
|
Differential Voltage |
|
|
Resource |
External DMM |
|
Range |
1µV to 100V |
|
Pulse Generation |
|
|
Resource |
Semight Per-pin PGU S2018G |
|
Amplitude |
±20V (Open), ±10V(50Ω) |
|
Frequency |
0.1Hz to 5MHz |
|
Pulse Width |
100ns to (Period - 100ns) |
|
Tr/Tf |
<100ns (Typ 50ns） |
|
Frequency Measurement |
|
|
Resource |
External Signal Analyzer |
|
Frequency Range |
9K to 20M Hz |
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