Wafer Acceptance Test
WAT6600
Parallel Parametric Test System
WAT6600 is a high efficiency parallel parametric test system that can quickly perform accurate DC measurements, capacitance measurements, and other high-frequency applications (such as ring oscillator measurements), flash memory tests and so on.
Features
Self-developed
Self-developed hardware and measurement resources
High output capability
Perpin resource providing
Configurable Pin number
Maximum 48 Pin full kelvin
High precision
The accuracy down to 1pA,
SECS/GEM compliance
Easy integration to customer EAP or factory automation
Built-in Maintenance software
CAL/DIAG/PV
Compatible with 48pin
48pin 230mm-diamter probe card
Compatible with mainstream probers
TEL P8XL/P12/P12XL/Precio XL, TSK UF200/UF3000/UF3000EX, etc.
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# |
Category |
Sub-Category |
Description |
|
1 |
System Cabinet |
Cabinet |
Rack, EMO Power Supply and Distribution Unit |
|
Controller |
Win10 Workstation, ptSEMIGHT software suites |
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|
LCR |
Optional 1fF~100nF range Frequency:1KHz~1MHz |
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DMM |
Optional 7 ½ display resolution |
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Signal Analyzer |
Optional 9K~10M frequency range |
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PXIe Chassis |
Optional For external HV-SPGU |
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|
Semiconductor Pulse Generator |
Optional（S3023P) ±40V(Open), ±20V(50Ω)
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2 |
Test Head |
Mainframe |
Configurable pins |
|
Pin Board |
Semight S2018G: Per-pin SMU: ±200V, ±1A, 100nV/1fA Per-pin PGU: ±20V(Open), ±10V(50Ω) |
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Aux port |
Default configuration: 8 BCN Port for external Instrument |
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Application |
|
|
Inline E-test, BEOL WAT, WLR for advanced process |
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Test Items (typical) |
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IV/CV |
Id-Vd，Id-Vg，Vth，BV，Ig，Ioff，Gm |
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MIM_CAP，C & G |
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Ic-Vc，BETA，BV |
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|
Ron，R_tlm，Rsh_van |
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|
Spot，Sweep，Search |
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|
Kelvin & Non-Kelvin |
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Differential Voltage |
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Frequency |
Ring Oscillator Frequency |
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Reliability |
HCI，NBTI/PBTI，TDDB, etc. |
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DC |
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Resource |
Semight Per-pin SMU S2018G |
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Function |
Spot, Sweep |
|
|
S2018G: 1fA to 1A, 100nV to 200V |
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Capacitance |
|
|
Resource |
External LCR |
|
Function |
C/G |
|
Frequency |
1kHz, 10kHz, 100kHz, 1MHz |
|
Range |
1fF to 100nF |
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DC Bias |
±40 V |
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Differential Voltage |
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|
Resource |
External DMM |
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Range |
1µV to 100V |
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Pulse Generation |
|
|
Resource |
Semight Per-pin PGU S2018G |
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Amplitude |
±20V (Open), ±10V(50Ω) |
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Frequency |
0.1Hz to 5MHz |
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Pulse Width |
100ns to (Period - 100ns) |
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Tr/Tf |
<100ns (Typ 50ns） |
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Frequency Measurement |
|
|
Resource |
External Signal Analyzer |
|
Frequency Range |
9K to 20M Hz |
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