In the process of semiconductor component production and development or semiconductor wafer packaging and testing, electrical performance parameters need to be characterized. These measurements require precision source meters (Source/Measure Unit), LCR meters (LCR Meter), digital multi-meters (Digital Multi-Meter) ) and other precision instruments to form an automated test system to measure very low currents, picoamps or less, any leakage current in the test system will have a great impact on the test results.

Semight Instruments Low Leakage Current Switch Matrix RM1010-LLC (Low Leakage Current Switch Matrix) adopts special technology and components, which can effectively suppress the leakage current in the circuit, provide higher resolution and accuracy, and meet more High-level test requirements, and equipped with multiple protection functions, can prevent overload, short circuit, etc., and protect test instruments and DUTs.

1 product introduction

Semight Instruments RM1010-LLC 4-slot semiconductor switch matrix can support a variety of switch matrix cards. Users can easily switch between different test channels through the application software of the host computer and quickly build a test system.

RM1010-LLC supports traditional SCPI commands, which makes the migration of test codes easy and fast. RM1010-LLC also supports parallel connection of multiple machines, which facilitates the establishment of large-scale test systems, improves test efficiency and reduces costs.

2 Features and advantages

01 Multiple input and output

14 inputs 48 outputs (low-leakage matrix configuration up to 96 cross-nodes)

02 low leakage current

Offset current less than 100fA (low leakage current channel)

03 High Speed Signal Measurement

High bandwidth 10 MHz bandwidth (-3dB)

04 Modular design, easy to use together    

Modular design supports x12, x24, x36 and x48 three-axis output configurations

Switch Matrix Block Diagram

3 Application Scenario

In the semiconductor parameter test system W AT6200S of Semight Instruments , the system combines high-precision PXI e digital source meter S 2012C with DMM (Digital Multi  - meter), LCR instrument and low leakage switch matrix RM1010-LLC to Resources are shared between test points.

Triaxial cables and low leakage switch matrices are critical to maintaining low leakage throughout the test.

2012C As the system IV measurement core source meter / triaxial probe card

Schematic diagram of semiconductor parameter test system /  2012C and application of R LM1010 in W AT6200S