Wafer Level Reliability
WLR0200
Single-site Wafer Level Reliability Test Equipment
The WLR0200 Single-site Wafer-Level Reliability Test Equipment is a reliability test equipment designed and developed based on the JEDEC reliability test standard, which mainly consists of a tester and a probe table, and it can realize the test of TDDB/HCI/BTI/NBTI/QBD/AC BTI/CV/Vth and other functions.
Features
High temperature resistance
Probe table temperature up to 300 ℃
Support 4-12 inch wafers
Using MPI customized high-temperature semi-automatic probe stations
High testing frequency up to 1MHz
Using high-precision and high-frequency capacitance testing instruments
Independently developed
The testing Source meter unit adopts high-precision SMU self-developed by Semight
Multiple measurement modes
Supports TDDB/HCI/NBTI/EM test modes
Real-time curve display
Real-Time Wafer Map and Test Curve Display
Nitrogen Protection
Platform unification Prevents wafer oxidation (non-pressurized)| System | Device size (W x D x H) | 1100mm; X 1150mm; X 2000mm | |
| System power | 2KVA | ||
| DUT; quantity | 1 Wafer | ||
| MES system interface | Support customized development and integration with customer MES systems and data | ||
| OS | WLR_ OS @ Windows; ten | ||
| Test monitor | OS | Windows; ten | |
| CPU | I7-10200 | ||
| storage | 16GB@ DDR4 | ||
| HDD | 2T; SSD | ||
| Ethernet | 10/100/1000base TX; X2 | ||
| display | 21.5; In Wide Monitor | ||
| Z1-PLUS | Wafer size | Up; To 12 Inch | |
| X-Y; Movement | Travel | 260mm (X) / 280mm (Y) | |
| Resolution | zero point one μ M (X) / zero point one μ M (Y) | ||
| Repeatability | one point five μ M | ||
| Z Movement | Travel | 10mm | |
| Resolution | 0.1μm | ||
| Repeatability | ±1μm | ||
| Theta Movement | Travel | ±7.5° | |
| Resolution | 0.0004° | ||
| Temperature | Temperature range | RT~300 ℃ | |
| Temperature uniformity | ± 1.5 ℃ @ 300 ℃ | ||
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Voltage & Current Measurement |
Wafer Size |
Up to 12 inch |
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Current Accuracy |
±150mA |
0.2%+25μA |
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±15mA |
0.2%+5μA |
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±1.5mA |
0.2%+150nA |
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±150μA |
0.2%+20nA |
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±15μA |
0.2%+3nA |
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±1.5μA |
0.3%+600pA |
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±150nA |
0.5%+300pA |
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Voltage Accuracy |
±200V |
0.2%+40mV |
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±20V |
0.2%+5mV |
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QBD Current Accuracy |
±10mA |
0.2%+2μA |
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±1mA |
0.2%+100nA |
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±100μA |
0.2%+20nA |
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±10μA |
0.2%+2nA |
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AC BTI Voltage Accuracy |
±55V |
0.5%+10mV@500KHz |
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±10V |
0.5%+2mV@500KHz |
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±1V |
0.5%+1mV@500KHz |
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| LCR parameters | Measurement parameters | Cs D, Cs Q, Cs Rs, Cp-D, Cp Q, Cp Rp, Cp-G | |
| Frequency | 120; Hz, 1 KHz, 1 MHz | ||
| Measurement accuracy | 120; Hz; (@ 100 uF, 0.5 V) | C: 0.085%, D: zero point zero zero zero six five | |
| 1 KHz; (@ 10 nF, 1 V) | C: 0.07%, D: zero point zero zero zero five | ||
| 1 MHz; (@ 10 pF, 1 V) | C: 0.07%, D: zero point zero zero zero five | ||
| Cable length | 0m, 1m, 2m | ||
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