Wafer Level Reliability
PLR0010
Package-Level Reliability Test Equipment
The Semight PLR0010 package-level reliability test equipment is a reliability test system developed based on the JEDEC reliability test standards. It is mainly used for testing functions such as TDDB (Time-Dependent Dielectric Breakdown), HCI (Hot Carrier Injection), NBTI (Negative Bias Temperature Instability), and EM (Electromigration). The test system can reach temperatures up to 250℃ and utilizes algorithm models to analyze data, enabling the analysis of process defects. Each channel of the system is equipped with independent overcurrent protection to ensure the safety of the devices under test (DUT). Additionally, it can interface with the customer's EAP system for production data management, facilitating in-depth performance analysis and quality control.
Features
Multi-test mode
Supports TDDB/HCI/NBTI/EM test modes；Compliant with JEDEC device reliability testing standards
Using the Micro Oven architecture
High temperatures up to four zones，Each oven can independently control temperature up to 250°C
High number of concurrent measurements
Capable of testing up to 960 DUTs simultaneously
Supports high voltage testing
Power supply can support up to 3500V
Support On-the-fly
Supports on-the-fly testing and data analysis
Self-developed software testing platform
Using Semight PLR software test platform, the test curve can be presented in real time, and the data output format can be customized according to user needs.Self-developed SMU
Adopt Semight high-precision source meter|
Parameter |
Description |
|
Operating Temperature |
15℃～55℃ |
|
Storage Temperature |
-10℃～50℃ |
|
Operating Humidity |
40～60% |
|
Storage Humidity |
<90%（non-condensing） |
|
Operating Altitude |
0～2000m |
|
Power Supply |
AC380V 3P+N+PE, 19.1A/50/60Hz &12KW |
|
EMC |
Comply to EU EMC Standards |
|
Safety |
Comply to EU Safety Standards |
|
Certification |
Comply to CE or Semi S2 certification |
|
Software System |
Linux |
|
Programming |
C#/C++ |
|
Software Features |
Test plan creation and setup, data display and analysis, MES interface, user access control, calibration and maintenance, fault diagnosis |
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