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Low Leakage Switch Matrix

RM1010-LLC

Low Leakage Switch Matrix


RM1010-LLC 4-slot semiconductor switch matrix can meet high-speed semiconductor test applications with S3022F benchtop or S2012C PXle plug-in card source measure unit. Easy to use GUI is also speeding up the development for new test functions and simplifying system integration. RM1010-LLC supports traditional SCPI commands, making the migration of test code easy and fast, it can support multi-machine parallel connection to improve system test efficiency and reduce costs.

Feature

  • Precise, consistent results

    14 inputs and 48 outputs
    (up to 96 cross-nodes in low leakage matrix configuration)
  • High resolution

    20 pA measurement resolution
    (With S3012H, S3022F, S2011C or S2012C SMU)
  • Rapid measurement

    Instantaneous current settling time<3.5 seconds(<450 fA,10V step)
  • High-speed signal measurement

    10 MHz Bandwidth (at - 3dB)
  • Flexible configuration

    Modular design
    Supports x12, x24, x36 and x48 three-axis output configurations
  • LED display panel

    Easy to use front panel design
  • PC GUI control software

    Remote measurement and control from PC
  • Convenient testing

    Supports traditional SCPI commands

Functions and advantages

  • Precise, consistent results

    14 inputs and 48 outputs (up to 96 cross-nodes in low leakage matrix configuration) 20 pA measurement resolution(With S3012H, S3022F, S2011C or S2012C SMU)










Secification



Input channels
2(Low Leakage I-V Port)
6(General I-V Port)
2(C-V Port)
2(DMM Port)
2(PGU Port)
Ouput channels 12/24/36/48
Max. Current rating 1 A
Max. Voltage rating 200V(Channel to Ground)
300V (Channel to Channel)


Close Ch Residual R
0.6 Ω(Low Leakage I-V Port)
1.0 Ω(General I-V Port)
1.0 Ω(C-V, HF Port)


Ch Isolation R1
1013 Ω(Low Leakage I-V Port)
1012 Ω(General I-V Port)
109 Ω(C-V, HF Port)






Typical Data
Offset current <0.1pA(Low Leakage I-V Port)
<1000pA(General I-V Port)


Offset voltage, Electro Motive Force (EMF) at 5 min
<80uV(Low Leakage I-V Port)
<110uV(General I-V Port)
<110uV(C-V, HF Port)
Channel Crosstalk Capacitance <0.3pF/CH
Additional C measurement Error <±1%±0.5pF(C-V Port)









Supplemental Information

Communication interface USB/LAN
Power Requirements 100/120/220/240 V ± 10%, 47 Hz to 63 Hz
Maximum VA 100W
Bandwidth(@ -3dB) <10MHz (C-V, HF Port)
Relay contact life >108 times
Settling time < 3.5s(< 450 fA,10V step)
Environment Indoor use
Work condition 0℃~+40℃,5%~80 % (no condensation)
Storage condition -40℃~70℃,5%~90 % (no condensation)
Altitude condition Operating: 0 m~2000 m
Storage:0 m ~4600 m

Note:
1、Insulation resistance test environment: 23℃± 5℃, 5% to 60% RH


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