Wafer Acceptance Test
WAT6300
WAT Serial High Voltage Parameter Testing System
WAT6300 is a serial high-voltage parameter testing system that can flexibly configure the number of pins, supporting up to 24 pins, and is compatible with mainstream WAT program probe cards and applications in the market.
Features
High precision
Current measurement accuracy< 1pA, resolution 1fA, maximum range 120mA for high voltage SMU，1V range for low voltage SMU； Voltage measurement accuracy< 50 μV. Resolution 100nV, maximum range 3500V
Support WAT testing for multiple wafers
Support Si/GaN/SiC
Flexible configuration of Pin count
Support up to 24Pin, and can flexibly configure Pin count
Self developed SMU
Self developed SMU board based on commercial or communication instruments
Capacitance testing frequency
Measurement range from 1kHz to 1MHz, 100fF to 100nF
Support all mainstream Probers
TEL P8XL/P12/P12XL/Precio XL, TSK UF200/UF3000/UF3000EX, etc.
High adaptability and full compatibility
Adapt to the probe card used in the Keysight 4070/4080 machine
Efficient ptSemight software environment
The software supports SECS/GEM and can connect to customer EAP
| Parameters/Configuration | function |
| Number of system pins | 3-24 pins |
| Number of SMUs | 3-8 |
| Standard SMU | 200 V/1 A |
| Chuck Bias SMU | 3500 V/120mA |
| Switch matrix |
Low voltage: 14x36,< 100 fA leakage current (low leakage channel) High voltage: 4 in 1, < 100pa leakage current |
| Minimum voltage resolution | 100 nV |
| Minimum current resolution | 1 fA |
| Maximum sampling speed | 1 M/s |
| Minimum current measurement accuracy | 1 pA |
| Minimum voltage measurement accuracy | 50 μV |
| Typical leakage current | < 1 pA |
| Capacitance range | 100 nF |
| Capacitance measurement accuracy | 0.5% |
|
Main measurement items |
Id-Vd, Id-Vg, Vth, BV, Ig, Ioff, Gm |
| MIM_ CAP, C& G | |
| Ic-Vc, BETA, BV | |
| Ron, R_ Tlm, Rsh_ Van | |
| Spot, Sweep, Search | |
| Kelvin& Non Kelvin | |
| Differential Voltage | |
| Frequency | |
| HCI, BTI/NBTI, TDDB | |
| DUT type | MOSFET, BJT, Diode, Resistor, Capacitor, etc |
| Probe card adapter | Compatible with Keysight 4070/4080 series probe cards |
| Factory automation | SECS/GEM (E5/E30/E37/E84/E90/E94) |
|
Voltage Source/Measurement |
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|
Voltage accuracy |
Range |
Resolution |
Accuracy (1 year) ± (% reading + offset) |
Typical noise (RMS) (0.1 Hz-10 Hz) |
|
±200 V |
100 μV |
0.03%+10 mV |
400 μV |
|
|
±40 V |
10 μV |
0.03%+2 mV |
100 μV |
|
|
±20 V |
10 μV |
0.03%+1 mV |
50 μV |
|
|
±6 V |
1 μV |
0.03%+0.4 mV |
9 μV |
|
|
±0.6 V |
100 nV |
0.03%+100 μV |
2 μV |
|
|
Temp coefficient |
±(0.15× accuracy indicator)/℃(0℃-18℃, 28℃-50℃) |
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|
Settling time |
<100 μs (typical value, Normal, step is 10%-90% of the range) |
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|
Overshoot |
<±0.1% (typical value, full scale range, resistive load test) |
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|
Current Source/Measurement |
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|
Current accuracy |
Range |
Resolution |
Accuracy (1 year) ± (% reading + offset) |
Typical noise (RMS) 0.1 Hz-10 Hz |
|
±1 A |
100 nA |
0.03% + 90 μA |
3 μA |
|
|
±100 mA |
10 nA |
0.03% + 9 μA |
200 nA |
|
|
±10 mA |
1 nA |
0.03% + 900 nA |
20 nA |
|
|
±1 mA |
100 pA |
0.03% + 90 nA |
2 nA |
|
|
±100 μA |
10 pA |
0.03% + 9 nA |
200 pA |
|
|
±1 μA |
100 fA |
0.03% + 200 pA |
10 pA |
|
|
±10 nA |
10 fA |
0.06% +9 pA |
300 fA |
|
|
±1 nA |
1 fA |
0.1% +3 pA |
60 fA |
|
|
±100 pA |
1 fA |
0.3% +1 pA |
30 fA |
|
|
Temp coefficient |
±(0.15× accuracy indicator)/℃(0℃-18℃, 28℃-50℃) |
|||
|
Settling time |
<100μs (typical value, Normal, step is 10%-90% of the range) |
|||
|
Overshoot |
<±0.1% (typical value, full scale range, resistive load test) |
|||
|
Voltage Source/Measurement |
||||
|
Voltage accuracy |
Range |
Measurement Resolution |
Accuracy (1 year) ± (% reading + offset) |
Typical noise (RMS) (0.1 Hz-10 Hz) |
|
±3500 V |
1 mV |
0.02%+600 mV |
50 mV |
|
|
±2500 V |
1mV |
0.02%+450 mV |
40 mV |
|
|
±1500 V |
1 mV |
0.02%+300 mV |
25 mV |
|
|
±600 V |
100 uV |
0.02%+120 mV |
10 mV |
|
|
±200 V |
100 uV |
0.02%+40 mV |
3 mV |
|
|
Temp coefficient |
±(0.15× accuracy indicator)/℃(0℃-18℃, 28℃-50℃) |
|||
|
Settling time |
<5 ms (typical value, Normal, step is 10%-90% of the range) |
|||
|
Overshoot |
<±0.1% (typical value, full scale range, resistive load test) |
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|
Current Source/Measurement |
||||
|
Current accuracy |
Range |
Measurement Resolution |
Accuracy (1 year) ± (% reading + offset) |
Typical noise (RMS) 0.1 Hz-10 Hz |
|
±120 mA1 |
3 uA |
0.02% + 35 μA |
120 uA |
|
|
±20 mA |
400 nA |
0.02% + 15 μA |
20 uA |
|
|
±10 mA |
200 nA |
0.02% + 3 uA |
10 uA |
|
|
±1 mA |
20 nA |
0.02% + 300 nA |
1 uA |
|
|
±100 μA |
2 nA |
0.02% + 30 nA |
100 nA |
|
|
±10 μA |
200 pA |
0.03% + 5 nA |
10 nA |
|
|
±1 μA |
20 pA |
0.03% + 1 nA |
1 nA |
|
|
±100 nA |
2 pA |
0.2% +100 pA+Vo x 100 fA |
100 pA |
|
|
±10 nA |
200 fA |
0.2% + 10 pA+ Vo x 10 fA |
10 pA |
|
|
±1 nA |
20 fA |
0.2% + 5 pA+ Vo x 1 fA |
1 pA |
|
|
Temp coefficient |
±(0.15× accuracy indicator)/℃(0℃-18℃, 28℃-50℃) |
|||
|
Settling time |
<10 ms (typical value, Normal, step is 10%-90% of the range) |
|||
|
Overshoot |
<±0.1% (typical value, full scale range, resistive load test) |
|||
Accuracy measurement condition：Temperature 23±5 Degree, Humidity 35%-60%, One hour later after power on, Integration Time is LONG（100nA range below）
|
Capacitance measurement specifications: Frequency |
Range |
Cap measurement accuracy |
Conductance measurement accuracy |
|
1MHz |
1 nF |
2.0% |
2.0% |
|
100 pF |
1.0% |
2.0% |
|
|
10 pF |
1.0% |
2.0% |
|
|
100KHz |
1 nF |
0.5% |
1.0% |
|
100 pF |
0.5% |
1.0% |
|
|
10 pF |
0.5% |
1.0% |
|
|
10KHz |
1 nF |
0.3% |
0.5% |
|
100 pF |
0.3% |
0.5% |
|
|
10 pF |
0.5% |
0.5% |
|
|
1KHz |
1 nF |
0.3% |
0.5% |
|
100 pF |
0.3% |
1.0% |
|
|
10 pF |
1.0% |
1.0% |
*Cm is capacitance measurement, Gm is conductance measurement, and F is frequency
*Dissipation D = Gm/(2*F*Cm)
*Keysight E4980AL/ Tonghui TH2838H is used for capacitance measurement; test conditions: Vrms=30mV, bias=0V,
Integration time=LONG, AVG=1
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