Wafer Acceptance Test
WAT6600
Parallel WAT Tester
WAT6600 is a Parallel Parametric Test tool for Wafer Acceptance Test,Per-Pin SMU for parallel test with maximal 24 SMUs, less test time and high throughput, stable supply chain and fast delivery time.
Features
Standard Pins
Support standard 48pin
Flexible Pins
Number of Pins = Number of SMUs, supports parallel testing of all Pins
Self-developed SMU board
Support Semight Instruments' HRSMU board cards
Flexible configuration of boards
Flexible configuration and selection of board types and number of boards
Tip leakage current
The noise (total machine leakage current) of the complete set with Probe Card is less than 1 pA.
High precision
Current measurement accuracy <1 pA, resolution 10 fA, maximum range 1 A;
High adaptation, full compatibility
Supports Keysight 4080 series probe cards,
ptSemight software
The software supports all EAP, SECS/GEM automation standard protocols
| System architecture | |
| parameters | Metrics |
| Pin count | 24 pin |
| SMU count | 24 SMUs (Per-Pin SMU) |
| HRSMU | 200 V/100 mA, sub-pA accuracy, 1 fA resolution |
| Finest voltage resolution | 100 nV |
| Finest current resolution | 1 fA |
| Sampling rate | >1 M/s |
| Finest current accuracy | 0.5 pA |
| Finest voltage accuracy | 30 μV |
| Leakage current | <1 pA |
| Capacitance measurement range | 100 nF |
| Capacitance measurement accuracy | 1% |
|
Measurement items |
Id-Vd, Id-Vg, Vth, BV, Ig, Ioff, Gm |
| MIM_CAP, C&G | |
| Ic-Vc, BETA, BV | |
| Ron, R_tlm, Rsh_van | |
| Frequency | |
| Pulse | |
| Spot, Sweep, Search, Kelvin | |
| HCI, BTI/NBTI, TDDB | |
| DUT | MOS, BJT, Diode, Resistor, Capacitor, Combo, MIM, etc. |
| Probe Card | Compatible with Keysight 4080 |
| Factory automation | Comply with SECS/GEM E5/E30/E37/E40/E87/E90/E94/E84 |
|
Voltage Source/Measurement |
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|
Voltage accuracy |
Range |
Resolution |
Accuracy (1 year) ±(% reading + offset) |
Typical noise (RMS) (0.1 Hz-10 Hz) |
|
±200 V |
100 μV |
0.03%+10 mV |
400 μV |
|
|
±40 V |
10 μV |
0.03%+2 mV |
100 μV |
|
|
±20 V |
10 μV |
0.03%+1 mV |
50 μV |
|
|
±2 V |
1 μV |
0.03%+100 μV |
10 μV |
|
|
±0.2 V |
100 nV |
0.03%+60 μV |
10 μV |
|
|
Temp coefficient |
±(0.15× accuracy indicator)/℃(0℃-18℃, 28℃-50℃) |
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|
Settling time |
<100 μs (typical value, Normal, step is 10%-90% of the range) |
|||
|
Overshoot |
<±0.1% (typical value, full scale range, resistive load test) |
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|
Current Source/Measurement |
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|
Current accuracy |
Range |
Resolution |
Accuracy (1 year) ±(% reading + offset) |
Typical noise (RMS) 0.1 Hz-10 Hz |
|
±1 A |
100 nA |
0.03% + 90 μA |
3 μA |
|
|
±100 mA |
10 nA |
0.03% + 9 μA |
200 nA |
|
|
±10 mA |
1 nA |
0.03% + 900 nA |
20 nA |
|
|
±1 mA |
100 pA |
0.03% + 90 nA |
2 nA |
|
|
±100 μA |
10 pA |
0.03% + 9 nA |
200 pA |
|
|
±10 μA |
1 pA |
0.03% +1 nA |
30 pA |
|
|
±1 μA |
100 fA |
0.03% + 200 pA |
10 pA |
|
|
±100 nA |
100 fA |
0.06% +30 pA |
5 pA |
|
|
±10 nA |
10 fA |
0.06% +9 pA |
300 fA |
|
|
±1 nA |
1 fA |
0.1% +3 pA |
60 fA |
|
|
±100 pA |
1 fA |
0.3% +1 pA |
30 fA |
|
|
Temp coefficient |
±(0.15× accuracy indicator)/℃(0℃-18℃, 28℃-50℃) |
|||
|
Settling time |
<100μs (typical value, Normal, step is 10%-90% of the range) |
|||
|
Overshoot |
<±0.1% (typical value, full scale range, resistive load test) |
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|
Capacitance measurement specifications: Frequency |
Range |
Cap measurement accuracy |
Conductance measurement accuracy |
|
1MHz |
1 nF |
2.0% |
2.0% |
|
100 pF |
1.0% |
2.0% |
|
|
10 pF |
1.0% |
2.0% |
|
|
100KHz |
1 nF |
0.5% |
1.0% |
|
100 pF |
0.5% |
1.0% |
|
|
10 pF |
0.5% |
1.0% |
|
|
10KHz |
1 nF |
0.3% |
0.5% |
|
100 pF |
0.3% |
0.5% |
|
|
10 pF |
0.5% |
0.5% |
|
|
1KHz |
1 nF |
0.3% |
0.5% |
|
100 pF |
0.3% |
1.0% |
|
|
10 pF |
1.0% |
1.0% |
*Cm is capacitance measurement, Gm is conductance measurement, and F is frequency
*Dissipation D =
Gm/(2*F*Cm)
*Capacitance is measured using Keysight E4980A or TongHui TH2838; test conditions: Vrms=30mV,
bias=0V, Integration time=LONG, AVG=1
|
Items |
Condition |
Specifications |
|
Pulse level |
50 Ω load |
-20V ~ +20V |
|
Open load |
-40V ~ +40V |
|
|
Accuracy |
Open load |
±（1%+100mV） |
|
Amplitude resolution |
50 Ω load |
2.5mV |
|
Open load |
5mV |
|
|
Output connectors |
|
BNC/pogoset |
|
Source impedance |
|
50Ω ± 1% |
|
Output current |
|
800 mA peak (400 mA average) |
|
Overshoot（Ringing） |
50 Ω load |
±（5%+20mV） |
|
Items |
Subitems |
Specifications |
|
Frequency range |
|
0.1Hz ~5MHz |
|
Pulse period |
Programmable range |
200ns ~ 10s |
|
Resolution |
50ns |
|
|
Accuracy |
±1%（0.01%+200ps） |
|
|
Width |
Programmable range |
100ns ~( period -100ns) |
|
Resolution |
50ns |
|
|
Accuracy |
±（5%+2ns） |
|
|
Transition time（Tr and Tf） |
Minimum (10%~90% edge) |
<100ns |
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