WLR0200-Semight Instruments

Features

High temperature resistance
Probe table temperature up to 300 ℃
Supports 2-12 inch wafers
using MPI customized high-temperature semi-automatic probe stations
High testing frequencyup to 1MHz
Using high-precision and high-frequency capacitance testing instruments
Independently developed
The testing source table adopts high-precision SMU self-developed by Lianxun Instrument
Implement automatic testing and data analysis
for TDDB/QBD/BTI/AC BTI/Vth/CV
MAP chart format
Data can be presented as a MAP chart, and the data output format is optional
Nitrogen protection to prevent oxidation

System	Device size (W x D x H)	1100mm; X 1150mm; X 2000mm
	System power	2KVA
	DUT; quantity	1 Wafer
	MES system interface	Support customized development and integration with customer MES systems and data
	OS	WLR_ OS @ Windows; ten
Test monitor	OS	Windows; ten
	CPU	I7-10200
	storage	16GB@ DDR4
	HDD	2T; SSD
	Ethernet	10/100/1000base TX; X2
	display	21.5; In Wide Monitor
Z1-PLUS	Wafer size	Up; To 12 Inch
	X-Y; Movement	Travel	260mm (X) / 280mm (Y)
		Resolution	zero point one μ M (X) / zero point one μ M (Y)
		Repeatability	one point five μ M
	Z Movement	Travel	10mm
		Resolution	0.1μm
		Repeatability	±1μm
	Theta Movement	Travel	±7.5°
		Resolution	0.0004°
	Temperature	Temperature range	RT~300 ℃
		Temperature uniformity	± 1.5 ℃ @ 300 ℃

Voltage & Current Measurement	Wafer Size	Up to 12 inch
	Current Accuracy	±150mA	0.2%+25μA
		±15mA	0.2%+5μA
		±1.5mA	0.2%+150nA
		±150μA	0.2%+20nA
		±15μA	0.2%+3nA
		±1.5μA	0.3%+600pA
		±150nA	0.5%+300pA
	Voltage Accuracy	±200V	0.2%+40mV
	Voltage Accuracy	±20V	0.2%+5mV
	QBD Current Accuracy	±10mA	0.2%+2μA
		±1mA	0.2%+100nA
		±100μA	0.2%+20nA
		±10μA	0.2%+2nA
	AC BTI Voltage Accuracy	±55V	0.5%+10mV@500KHz
		±10V	0.5%+2mV@500KHz
		±1V	0.5%+1mV@500KHz

LCR parameters	Measurement parameters	Cs D, Cs Q, Cs Rs, Cp-D, Cp Q, Cp Rp, Cp-G
	Frequency	120; Hz, 1 KHz, 1 MHz
	Measurement accuracy	120; Hz; (@ 100 uF, 0.5 V)	C: 0.085%, D: zero point zero zero zero six five
		1 KHz; (@ 10 nF, 1 V)	C: 0.07%, D: zero point zero zero zero five
		1 MHz; (@ 10 pF, 1 V)	C: 0.07%, D: zero point zero zero zero five
	Cable length	0m, 1m, 2m

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