PXIe SMU
S2013C
Single-Channel PXIe Precision SMU
特点
high-precision
Resolution up to 100 fA/100 nVHigh range and high-speed measurement
±200 V, ±1A (DC)Adaptive PFC system
Leverages Adaptive PFCBuilding multi-channel parallel test system
Based on standard PXIE chassis,Functions and advantages
(5) function in one body
Voltage sourceCan test various equipment
Capture more measurement data
♦ 6.5-digit resolution: Enjoy best-in-class 6.5-digit sourcing and measurement resolution;Rich scanning function
DC I-V output capacity
Pulse I-V output capacity
Voltage Programming and Measurement specifications
Voltage accuracy |
Range | Programming resolution |
Accuracy (1 Year) ± (% reading+ offset) |
Typical Noise(RMS) 0.1 Hz-10Hz |
±200 V | 100 μV | 0.03%+10 mV | 0.4 mV | |
±20 V | 10 μV | 0.03%+1 mV | 50 μV | |
±6 V | 1 μV | 0.03%+0.4 mV | 9 μV | |
±0.6 V | 100 nV | 0.03%+100 μV | 2 μV | |
Temperature coefficient | ±(0.15 × accuracy)/°C (0℃-18℃,28℃-50℃) | |||
Settling time | <50μs (typical) | |||
Overshoot | <±0.1% (Typical.Normal.Step is 10 % to 90 % range, full range, resistive load) | |||
Noise 10Hz-20MHz |
20 V voltage source,1 A resistive load, <5 mVrms |
Current Programming and Measurement specifications
Current accuracy
|
Range |
Programming resolution |
Accuracy (1 Year) ± (% reading+ offset) |
Typical Noise (RMS) 0.1 Hz-10 Hz |
±3 A1 |
1 μA |
0.03% + 2 mA |
20 μA |
|
±1 A |
100 nA |
0.03% + 90 μA |
4 μA |
|
±100 mA |
10 nA |
0.03% + 9 μA |
600 nA |
|
±10 mA |
1 nA |
0.03% + 900 nA |
60 nA |
|
±1 mA |
100 pA |
0.03% + 90 nA |
6 nA |
|
±100 μA |
10 pA |
0.03% + 9 nA |
700 pA |
|
±10 μA |
1 pA |
0.03% +1 nA |
80 pA |
|
±1 μA2 |
100 fA |
0.03% + 200 pA |
20 pA |
|
Temperature coefficient |
±(0.15 × accuracy)/℃ (0℃-18℃,28℃-50℃) |
|||
Settling time |
<100μs (typical) |
|||
Overshoot |
<±0.1% (Typical. Normal mode. Step is 10 % to 90 % range, full range, resistive load) |
1、3 A range is available only for pulse mode, accuracy specifications for 3 A range are typical.
2、Low Current Measurements, Triaxial Cable is recommended to connect: HI connect to core cable, Guard connects to inner shield, outer shield connects to protective ground, LO connect to core cable, inner shield not connect, and outer shield connect to protective ground. Triaxial Cable rated insulation voltage is not less than 250V.
Pulse source specifications (4W)
Minimum programmable pulse width | 100 μs | |||
Pulse width programming resolution | 1 μs | |||
Pulse width programming accuracy | ±10 μs | |||
Pulse width jitter | 2 μs | |||
Pulse width definition | The time from 10 % leading to 90 % trailing edge as follows |
Item | Maximums | Maximum pulse width | Maximum duty cycle | |
1 | 0.1 A/200 V | DC,no limit | 100% | |
2 | 1 A/20 V | DC,no limit | 100% | |
3 | 3 A/66.6 V | 1 ms | 5% | |
4 | 3 A/160 V | 400 μs | 2% |
Typical Pulse Performance(4W)
Source | Maximum output | Typical rise time1 | Typical Settling Time2 | Test load |
|
160 V | 800 μs | 1.2 ms | NO load |
5 V | 40 μs | 100 μs | NO load | |
|
3A~1 mA | 90 μs | 250 μs | Full load |
100μA ~10 μA | 120 μs | 400 μs | Full load | |
1 μA | 800 μs | 1.2 ms | Full load |
1、Leading edge, the time from 10 % leading to 90 % leading
2、The time required from Pulse out 0 to reach within 1 % of final value
3、Test condition: Normal, resistive load 6V maximum output
Sampling rate and NPLC setting
Setting | Range | |||
NPLC | 0.00005 PLC ~ 10 PLC | |||
Sampling Rate | 5 sps ~ 1 Msps |
Typical output settling time
Source |
Range |
Output settling time1 |
Condition |
||
Fast2 |
Normal |
Slow |
|||
Voltage |
200 V |
<500 μs |
<1 ms |
<2 ms |
Time required to reach within 0.1 % of final value at open load condition. Step is 10 % to 90 % range |
20 V |
<60 μs |
<100 μs |
<600 μS |
||
6 V |
<60 μs |
<100 μs |
<300 μs |
||
0.6 V |
<50 μs |
<50 μs |
<50 μs |
||
Current |
3 A~1 mA |
<50 μs |
<100 μs |
<0.8 ms |
Time required to reach within 0.1 % (0.3 % for 3 A range) of final value at short condition. Step is 10 % to 90 % range |
100μA~10 μA |
<100 μs |
<150 μs |
<0.8 ms |
||
1 μA |
<1 ms |
<1 ms |
<1 ms |
1,Output transition speed:Fast, Normal, Slow. Users can adjust the APFC parameters based on the load characteristics to obtain precision, and fast output characteristics
2, Slow mode is recommended for overshoot sensitive equipment, Fast mode may have overshoot on output in some condition
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