High Voltage SMU
S3030F
Single-Channel High voltage Precision Source Meter
Features
High range
Range：±3500 V、±120 mA（DC）、180 W
High resolution
The minimum measurement resolution can reach 1 fA/100 μV
High sampling rate
Supports up to 1M ADC sampling rate
Threshold trigger
Hardware high-speed IO, capable of threshold triggering, enabling efficient interaction between output measurement values and user systemsFeatures and Benefits
DC I-V output capability
|
Voltage setting accuracy |
Range |
Programming resolution |
Accuracy (1 year) ± (% reading+offset) |
Typical noise(RMS) 0.1Hz-10Hz |
|
±3500 V |
40 mV |
0.02%+600 mV |
50 mV |
|
|
±2500 V |
30 mV |
0.02%+450 mV |
40 mV |
|
|
±1500 V |
20 mV |
0.02%+300 mV |
25 mV |
|
|
±600 V |
7 mV |
0.02%+120 mV |
10 mV |
|
|
±200 V |
3 mV |
0.02%+40 mV |
3 mV |
|
|
Temperature Coefficient |
±(0.15 × accuracy)/°C (0℃-18℃,28℃-50℃) |
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|
Settling time |
<5 ms (typical) |
|||
|
Overshoot |
<± 1 % (Typical. Norma mode. Step is 10 % to 90 % range, full range, resistive load) |
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|
Noise 10Hz-20MHz |
1500 V voltage source, 120 mA resistive load, < 200 mV RMS |
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|
Current setting accuracy |
Range |
Programming resolution |
Accuracy (1 year) ± (% reading+offest) |
Typical noise (RMS) 0.1Hz-10Hz |
|
±120 mA1 |
3 μA |
0.02% + 35 μA |
120 uA |
|
|
±20 mA |
400 nA |
0.02% + 15 μA |
20 uA |
|
|
±10 mA |
200 nA |
0.02% + 3 uA |
10 uA |
|
|
±1 mA |
20 nA |
0.02% + 300 nA |
1 uA |
|
|
±100 μA |
2 nA |
0.02% + 30 nA |
100 nA |
|
|
±10 μA |
200 pA |
0.03% + 5 nA |
10 nA |
|
|
±1 μA |
20 pA |
0.03% + 1 nA |
1 nA |
|
|
±100 nA |
2 pA |
0.2% +100 pA+Vo x 100 fA |
100 pA |
|
|
±10 nA |
200 fA |
0.2% + 10 pA+ Vo x 10 fA |
10 pA |
|
|
±1 nA |
20 fA |
0.2% + 5 pA+ Vo x 1 fA |
1 pA |
|
|
Temperature Coefficient |
±(0.15 × accuracy)/°C (0℃-18℃,28℃-50℃) |
|||
|
Settling time |
<10 ms (typical) |
|||
|
Overshoot |
<± 1 % (Typical. Norma mode. Step is 10 % to 90 % range, full range, resistive load) |
|||
1，120mA range only supports 1500V and below voltage range
|
Voltage measurement accuracy
|
Range |
Measurement resolution |
Accuracy (1 year) ± (% reading+offset) |
|
±3500 V |
1 mV |
0.02%+600 mV |
|
|
±2500 V |
1 mV |
0.02%+450 mV |
|
|
±1500 V |
1 mV |
0.02%+300 mV |
|
|
±600 V |
100 μV |
0.02%+120 mV |
|
|
±200 V |
100 μV |
0.02%+40 mV |
|
|
Temperature Coefficient |
±(0.15 × accuracy)/°C (0℃-18℃,28℃-50℃) |
||
|
|
Range |
Measurement resolution |
Accuracy (1 year) ± (% reading+oddset) |
|
±120 mA1 |
100 nA |
0.02% + 35 μA |
|
|
±20 mA |
10 nA |
0.02% + 15 μA |
|
|
±10 mA |
10 nA |
0.02% + 3 μA |
|
|
±1 mA |
1 nA |
0.02% + 300 nA |
|
|
±100 μA |
100 pA |
0.02% + 30 nA |
|
|
±10 μA |
10 pA |
0.03% + 5 nA |
|
|
±1 μA |
1 pA |
0.03% + 1 nA |
|
|
±100 nA |
100 fA |
0.2% +100 pA+Vo x 100 fA |
|
|
±10 nA |
10 fA |
0.2% + 10 pA+ Vo x 10 fA |
|
|
±1 nA |
1 fA |
0.2% + 5 pA+ Vo x 1 fA |
|
|
Temperature Coefficient |
±(0.15 × accuracy index)/°C (0℃-18℃,28℃-50℃) |
||
1，120mA range only supports 1500V and below voltage range.
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