Wafer Level Burn-In
AL3500A
Wafer Auto Load/Unload System
AL3500A is an automated auxiliary equipment for Wafer level burn-in system WLR3500, assist the operator to complete the wafer alignment and fixture automatic installation.
Feature
Adapter products
Support 4-6 inch wafer Load/Unload automaticallyQuantity
Wafer quantity≤25 pcsSpeed
<5 min/pcsPosition accuracy
±25 umFunctions and advantages
System architecture
Wafer size | 4, 6 inch |
Dimension | 1500 mm(W)×1800 mm(H)×1400 mm(D) |
Power dissipation | 3 kW |
Wafer quantity | ≤25 pcs |
Fixture quantity | ≤6 pcs |
Speed | <5 min/pcs |
Position accuracy | ±50 um |
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