High Voltage Source Measure Unit
S3030F
Single-channel High Voltage SMU
Features
High Range
Range: ±3500 V, ±120 mA(DC), 180 W
High Resolution
The minimum measurement resolution can reach 10 fA/100 μV
High Sampling Rate
Supports up to 1M ADC sampling rate
Threshold Trigger
Hardware high-speed IO, capable of threshold triggering, enabling efficient interaction between output measurement values and user systemsFunctions and Advantages
DC I-V Output Capability
|
Voltage Setting Accuracy[2] |
Range |
Programming Resolution |
Accuracy (1 year) ± (% reading+offset)[1] |
Typical Noise(RMS) 0.1Hz-10Hz |
|
±3500 V |
40 mV |
0.02%+600 mV |
50 mV |
|
|
±2500 V |
30 mV |
0.02%+450 mV |
40 mV |
|
|
±1500 V |
20 mV |
0.02%+300 mV |
25 mV |
|
|
±600 V |
7 mV |
0.02%+120 mV |
10 mV |
|
|
±200 V |
3 mV |
0.02%+40 mV |
3 mV |
|
|
Temperature Coefficient |
±(0.15 × accuracy)/°C (0℃-18℃, 28℃-50℃) |
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|
Settling Time |
<5 ms (typical) |
|||
|
Overshoot |
<± 1 % (typical. norma mode. step is 10 % to 90 % range, full range, resistive load) |
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|
Noise 10Hz-20MHz |
1500 V voltage source, 120 mA resistive load, < 200 mV RMS |
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[1] Accuracy calculation example: Testing the accuracy of a 1500V range with a 1000V output, the tolerance is:
[2] This instrument has a potentially dangerous high voltage output (±3500 V) to the HI / Sense HI / Guard terminals. To prevent electric shock, relevant precautions must be taken before powering on. Safety measures. Do not connect the Guard terminal to any output, including shorting it to the chassis ground or output LO, as this will damage the instrument.
|
Current Setting Accuracy |
Range |
Programming Resolution |
Accuracy (1 year) ± (% reading+offest) |
Typical Noise (RMS) 0.1Hz-10Hz |
|
±120 mA[3] |
3 μA |
0.02% + 35 μA |
120 μA |
|
|
±20 mA |
400 nA |
0.02% + 15 μA |
20 μA |
|
|
±1 mA |
20 nA |
0.02% + 300 nA |
1 μA |
|
|
±100 μA |
2 nA |
0.02% + 30 nA |
100 nA |
|
|
±10 μA |
200 pA |
0.03% + 5 nA |
10 nA |
|
|
±1 μA |
20 pA |
0.03% + 1 nA |
1 nA |
|
|
±100 nA |
2 pA |
0.2% +100 pA+Vo * 100 fA |
100 pA |
|
|
±10 nA |
200 fA |
0.2% + 10 pA+ Vo * 10 fA |
10 pA |
|
|
Temperature Coefficient |
±(0.15 × accuracy)/°C (0℃-18℃, 28℃-50℃) |
|||
|
Settling Time |
<10 ms (typical) |
|||
|
Overshoot |
<± 1 % (typical. normal mode. step is 10 % to 90 % range, full range, resistive load) |
|||
[1] 120mA range only supports 1500V and below voltage range
|
Voltage Measurement Accuracy
|
Range |
Measurement Resolution |
Accuracy (1 year) ± (% reading+offset) |
|
±3500 V |
1 mV |
0.02%+600 mV |
|
|
±2500 V |
1 mV |
0.02%+450 mV |
|
|
±1500 V |
1 mV |
0.02%+300 mV |
|
|
±600 V |
100 μV |
0.02%+120 mV |
|
|
±200 V |
100 μV |
0.02%+40 mV |
|
|
Temperature Coefficient |
±(0.15 × accuracy)/°C (0℃-18℃, 28℃-50℃) |
||
|
|
Range |
Measurement Resolution |
Accuracy (1 year) ± (% reading+offset) |
|
±120 mA[4] |
100 nA |
0.02% + 35 μA |
|
|
±20 mA |
10 nA |
0.02% + 15 μA |
|
|
±1 mA |
1 nA |
0.02% + 300 nA |
|
|
±100 μA |
100 pA |
0.02% + 30 nA |
|
|
±10 μA |
10 pA |
0.03% + 5 nA |
|
|
±1 μA |
1 pA |
0.03% + 1 nA |
|
|
±100 nA |
100 fA |
0.2% +100 pA+Vo * 100 fA |
|
|
±10 nA |
10 fA |
0.2% + 10 pA+ Vo * 10 fA |
|
|
Temperature Coefficient |
±(0.15 × accuracy index)/°C (0℃-18℃, 28℃-50℃) |
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[1] 120mA range only supports 1500V and below voltage range
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