Standard Benchtop SMU
S3022F
Dual-channel Precision SMU
The S3022F is a high-precision, compact and cost-effective benchtop Source/Measure Unit (SMU) with the capability to source and measure both voltage and current. The S3022F is ideal for a wide variety of IV (current versus voltage) measurement tasks that require both high resolution and accuracy.
Features
High Range
Range: ±200 V, ±3 A(DC), ±10A(pulse)
High Resolution
The minimum measurement resolution can reach 100 fA / 100 nV
High Sampling Rate
Up to 1M ADC sampling rate
Threshold Trigger
Single machine and multi-machine synchronization, pure hardware high-speed synchronization, can achieve multi-channel low-latency synchronizationFunctions and Advantages
(5) Functions In One Body
Integration of five functions
♦ The first and third quadrants are the source: the actual polarity of the output V/I follows the source setting
♦ The second and fourth quadrants are the load: CC and CV cooperate, when the load is used, the load setting polarity is opposite to the source polarity
Can Test Various Equipment
Capture More Measurement Data
♦ 6.5-bit digital resolution: accuracy equivalent to6-and-a-half digits a multimeter.
Rich Scanning Function
Voltage Programming Accuracy |
Range | Programming Resolution |
Accuracy (1 Year) ± (% reading+ offset) |
Typical Noise (RMS) 0.1 Hz-10 Hz |
|||
| ±200 V | 1 mV | 0.02%+30 mV | 1.5 mV | ||||
| ±20 V | 100 μV | 0.02%+2 mV | 160 μV | ||||
| ±6 V | 50 μV | 0.02%+500 μV | 36 μV | ||||
| ±200 mV | 1 μV | 0.02%+120 μV | 4 μV | ||||
| Temperature Coefficient | ±(0.15 × accuracy)/°C (0℃-18℃,28℃-50℃) | ||||||
| Maximum Output Power | 30W: ±20 V@1.5 A, ±200 V@0.1 A; 18 W: ±6 V@3 A | ||||||
| Settling Time | <800 μs (typical) | ||||||
| Overshoot | <±0.1% (typical. normal mode. step is 10% to 90% range, full range, resistive load) | ||||||
| Noise 10Hz-20MHz | 6 V voltage source, 3 A resistive load, <3 mVrms | ||||||
Current Programming Accuracy |
Range | Programming Resolution |
Accuracy (1 Year) ± (% reading+ offset) |
Typical Noise (RMS) 0.1 Hz-10Hz |
|||
| ±10 A[1] | 50 μA | 0.4% + 40 mA | NA | ||||
| ±3 A | 15 μA | 0.05% + 2 mA | 40 μA | ||||
| ±1.5 A | 10 μA | 0.02% + 500 μA | 20 μA | ||||
| ±150 mA | 1 μA | 0.02% + 25 μA | 5 μA | ||||
| ±15 mA | 100 nA | 0.02%+6 μA | 700 nA | ||||
| ±1.5 mA | 10 nA | 0.02% + 250 nA | 16 nA | ||||
| ±150 μA | 1 nA | 0.02% + 25 nA | 1 nA | ||||
| ±15 μA | 100 pA | 0.02% + 3 nA | 140 pA | ||||
| ±1.5 μA | 10 pA | 0.03% + 450 pA | 25 pA | ||||
| ±150 nA | 1 pA | 0.05%+250 pA | 5 pA | ||||
| Temperature Coefficient | ±(0.15 × accuracy)/°C (0℃-18℃,28℃-50℃) | ||||||
| Maximum Output Power | 30W: ±20V@1.5A, ±200V@0.1A; 18W: ±6 V@3A | ||||||
| Settling Time | <500 μs (typical) | ||||||
| Overshoot | <±0.1% (typical. normal mode. step is 10% to 90% range, full range, resistive load) | ||||||
[1] 10A range is available only for pulse mode, accuracy specifications for 10A range are typical
Voltage Measurement Accuracy |
Range | Measurement Resolution |
Accuracy (1 Year) ± (% reading+ offset) |
||||
| ±200 V | 100 μV | 0.02% + 30 mV | |||||
| ±20 V | 10 μV | 0.02% + 2 mV | |||||
| ±6 V | 1 μV | 0.02% + 500 μV | |||||
| ±200 mV | 100 nV | 0.02% + 120 μV | |||||
| Temperature Coefficient | ±(0.15 × accuracy)/°C (0℃-18℃, 28℃-50℃) | ||||||
Current Measurement Accuracy |
Range | Measurement Resolution | Accuracy (1 Year)± (% reading+ offset) | ||||
| ±10 A[1] | 10 μA | 0.4% + 25 mA | |||||
| ±3 A | 10 μA | 0.05% + 2 mA | |||||
| ±1.5 A | 1 μA | 0.02% + 500 μA | |||||
| ±150 mA | 100 nA | 0.02% + 25 μA | |||||
| ±15 mA | 10 nA | 0.02% + 6 μA | |||||
| ±1.5 mA | 1 nA | 0.02% + 250 nA | |||||
| ±150 μA | 100 pA | 0.02% + 25 nA | |||||
| ±15 μA | 10 pA | 0.02% +3 nA | |||||
| ±1.5 μA[2] | 1 pA | 0.03% + 450 pA | |||||
| ±150 nA[2] | 100 fA | 0.05% + 250 pA | |||||
| Temperature Coefficient | ±(0.15 × accuracy)/°C (0℃-18℃, 28℃-50℃) | ||||||
Resistance Measurement Accuracy |
Range | Measurement Resolution | Test Current |
Accuracy (1 Year) ± (% reading+ offset) |
|||
| 1 Ω | 1 μΩ | 1.5 A | 0.073% +0.3334 mΩ | ||||
| 10 Ω | 10 μΩ | 150 mA | 0.057% + 3.334 mΩ | ||||
| 100 Ω | 100 μΩ | 15 mA | 0.08% + 33.34 mΩ | ||||
| 1 kΩ | 1 mΩ | 1.5 mA | 0.057% + 333.4 mΩ | ||||
| 10 kΩ | 10 mΩ | 150 μA |
0.057% + 3.334 Ω | ||||
| 100 kΩ | 100 mΩ | 15 μA | 0.06% + 33.34 Ω | ||||
| 1 MΩ | 1 Ω | 1.5 μA | 0.06% + 333.4 Ω | ||||
| 10 MΩ | 10 Ω | 0.15 μA | 0.35% + 3.334 kΩ | ||||
| 100 MΩ | 100 Ω | 0.05 μA | 0.95% + 10 kΩ | ||||
Temperature Coefficient |
±(0.15 × accuracy)/°C (0℃-18℃, 28℃-50℃) | ||||||
Source I Mode, Manual Ohm Measurement |
Total error = Vmeas/Isrc = R reading x (gain error % of V range + gain error % of I range + offset error of I source range/Isrc value %) + (offset error of V measure range/Isrc value) Example：I source value=1.5A at 1.5A range V measure range=6V range Total error(% reading + offset) =(0.02%+0.02%+500μA/1.5A)+(500μV/1.5A) ≈ 0.073%+0.3334mΩ | ||||||
| Minimum Programmable Pulse Width | 100 μs | ||||||
| Pulse Width Programming Resolution | 1 μs | ||||||
| Pulse Width Programming Accuracy | ±10 μs | ||||||
| Pulse Width Jitter | 2 μs | ||||||
| Pulse Width Definition | The time from 10% leading to 90% trailing edge as follows |
| Item | Maximums | Maximum Pulse Width | Maximum Duty Cycle | ||||
| 1 | 0.15 A/200 V | DC, no limit | 1 | ||||
| 2 | 1.5 A/20 V | DC, no limit | 1 | ||||
| 3 | 3 A/6 V | DC, no limit | 1 | ||||
| 4 | 3 A/20 V | 1 ms | 0.1 | ||||
| 5 | 10 A/6 V | 1 ms | 0.1 |
| Source | Range | Typical Rise Time[1,3] | Typical Settling Time[2,3] | Test Load | |||
Voltage |
200 V | 600 μs | 1.5 ms | No load | |||
| 20 V | 200 μs | 360 μs | No load | ||||
| 6 V | 160 μs | 300 μs | No load | ||||
Current |
10 A | 140 μs | 320 μs | Full load | |||
| 3 A | 120 μs | 280 μs | Full load | ||||
| 1.5 A | 120 μs | 280 μs | Full load | ||||
| 150 mA | 120 μs | 280 μs | Full load | ||||
| 15 mA | 120 μs | 280 μs | Full load | ||||
| 1.5 mA | 120 μs | 280 μs | Full load | ||||
| Setting | Range | ||||||
| NPLC | 0.00005 PLC ~ 10 PLC | ||||||
| Sampling Rate | 5 sps ~ 1 Msps |
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